Effect of process temperature on coefficient of friction during CMP

J. Sorooshian, D. Hetherington, A. Philipossian

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of process temperature on coefficient of friction during CMP'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy