Effect of particle interaction on agglomeration of silica-based CMP slurries

A. Sorooshian, R. Ashwani, H. K. Choi, M. Moinpour, A. Oehler, A. Tregub

Research output: Contribution to journal › Conference article › peer-review

24 Scopus citations

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Chemical Engineering

Keyphrases

Engineering

Material Science