Effect of Pad Surface Texture and Slurry Abrasive Concentration on Tribological and Kinetic Attributes of ILD CMP

Ara Philipossian, Scott Olsen

Research output: Contribution to journalConference articlepeer-review

9 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of Pad Surface Texture and Slurry Abrasive Concentration on Tribological and Kinetic Attributes of ILD CMP'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science