Effect of pad surface micro-texture on removal rate during tungsten chemical mechanical planarization

Yan Mu, Rouchen Han, Yasa Sampurno, Yun Zhuang, Ara Philipossian

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of pad surface micro-texture on removal rate during tungsten chemical mechanical planarization'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering