Skip to main navigation Skip to search Skip to main content

Effect of pad surface micro-texture on removal rate during tungsten chemical mechanical planarization

  • Yan Mu
  • , Rouchen Han
  • , Yasa Sampurno
  • , Yun Zhuang
  • , Ara Philipossian

Research output: Contribution to journal › Article › peer-review

21   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Effect of pad surface micro-texture on removal rate during tungsten chemical mechanical planarization'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science

Engineering