Effect of mechanical properties of PVA brush rollers on frictional forces during post-CMP scrubbing

Keyphrases

• PVA Brush 100%
• Scrubbing 100%
• Sensing Technology 14%
• Applied Load 14%
• Dynamic Mechanical Analysis 14%
• Applied Pressure 14%
• Pressure Sensing 14%
• Cleaning Solution 14%
• Brush Scrubbing 14%

Engineering

• Applied Pressure 50%
• Dynamic Mechanical Analysis 50%
• Applied Load 50%
• Mechanical Testing 50%
• Scrubbing 50%