Fingerprint
Dive into the research topics of 'Effect of conditioner type and downforce, and pad break-in time, on pad surface micro-texture in chemical mechanical planarization'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effect of conditioner type and downforce, and pad break-in time, on pad surface micro-texture in chemical mechanical planarization
Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno, Dale Hetherington, Jon Sierra Suarez, Leonard Borucki, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
19
Scopus
citations