Effect of cerium oxide particle sizes in oxide chemical mechanical planarization

Yasa Sampurno; Fransisca Sudargho; Yun Zhuang; Toranosuke Ashizawa; Hiroyuki Morishima; Ara Philipossian

doi:10.1149/1.3098401

Effect of cerium oxide particle sizes in oxide chemical mechanical planarization

Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Toranosuke Ashizawa, Hiroyuki Morishima, Ara Philipossian

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

This study explored the effect of different cerium oxide abrasive particle sizes in chemical mechanical planarization of 200 mm blanket plasma-enhanced tetraethylorthosilicate wafers. All polishing experiments were done with a polisher and tribometer capable of measuring shear force and down force in real-time. Coefficient of friction and removal rate were found to correlate well with the slurry median particle size distribution. Removal rate modeling based on particle size was explored to support the interpretation of the experimental results.

Original language	English (US)
Pages (from-to)	H191-H194
Journal	Electrochemical and Solid-State Letters
Volume	12
Issue number	6
DOIs	https://doi.org/10.1149/1.3098401
State	Published - 2009
Externally published	Yes

ASJC Scopus subject areas

General Chemical Engineering
General Materials Science
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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AU - Sampurno, Yasa

AU - Sudargho, Fransisca

AU - Zhuang, Yun

AU - Ashizawa, Toranosuke

AU - Morishima, Hiroyuki

AU - Philipossian, Ara

PY - 2009

Y1 - 2009

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AB - This study explored the effect of different cerium oxide abrasive particle sizes in chemical mechanical planarization of 200 mm blanket plasma-enhanced tetraethylorthosilicate wafers. All polishing experiments were done with a polisher and tribometer capable of measuring shear force and down force in real-time. Coefficient of friction and removal rate were found to correlate well with the slurry median particle size distribution. Removal rate modeling based on particle size was explored to support the interpretation of the experimental results.

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Effect of cerium oxide particle sizes in oxide chemical mechanical planarization

Abstract

ASJC Scopus subject areas

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