| Original language | English (US) |
|---|---|
| Article number | 8066418 |
| Pages (from-to) | 313 |
| Number of pages | 1 |
| Journal | IEEE Transactions on Semiconductor Manufacturing |
| Volume | 30 |
| Issue number | 4 |
| DOIs | |
| State | Published - Nov 2017 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering