Original language | English (US) |
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Article number | 8066418 |
Pages (from-to) | 313 |
Number of pages | 1 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 30 |
Issue number | 4 |
DOIs | |
State | Published - Nov 2017 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering