Editorial: 2015 IEEE TSM Best Paper Award

Anthony J. Muscat

doi:10.1109/TSM.2016.2552598

Editorial: 2015 IEEE TSM Best Paper Award

Anthony J. Muscat

Chemical and Environmental Engineering

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Article number	7464416
Pages (from-to)	69
Number of pages	1
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	29
Issue number	2
DOIs	https://doi.org/10.1109/TSM.2016.2552598
State	Published - May 2016

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/TSM.2016.2552598

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Editorial: 2015 IEEE TSM Best Paper Award

ASJC Scopus subject areas

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