Dynamics of cleaning and rinsing of micro and nano structures in single-wafer cleaning tools

  • Kedar Dhane
  • , Jeongnam Han
  • , Jun Yan
  • , Omid Mahdavi
  • , Davoud Zamani
  • , Bert Vermeire
  • , Farhang Shadman

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

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Keyphrases

Engineering

Material Science