The first results of the application of the dynamic programming principle to the optimization of electrostatic accelerating immersion lenses are presented. Axially symmetric electrostatic field distributions with minimum spherical aberration are found. The measured field distribution of an optimized lens is given. A new algorithm for the case of infinite magnification is proposed.
|Number of pages
|Published - 1978
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering