Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning

S. Tamilmani; V. Lowalekar; S. Raghavan; R. Small

doi:10.4028/www.scientific.net/SSP.103-104.283

Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning

S. Tamilmani, V. Lowalekar, S. Raghavan, R. Small

Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Original language	English (US)
Title of host publication	Ultra Clean Processing of Silicon Surfaces VII
Editors	Paul Mertens, Marc Meuris, Marc Heyns
Publisher	Trans Tech Publications Ltd
Pages	283-286
Number of pages	4
ISBN (Print)	9783908451068
DOIs	https://doi.org/10.4028/www.scientific.net/SSP.103-104.283
State	Published - 2005
Event	7th International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2004 - Brussels, Belgium Duration: Sep 20 2004 → Sep 22 2004

Publication series

Name	Solid State Phenomena
Volume	103-104
ISSN (Print)	1012-0394
ISSN (Electronic)	1662-9779

Other

Other	7th International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2004
Country/Territory	Belgium
City	Brussels
Period	9/20/04 → 9/22/04

Keywords

Ascorbic acid
Ceria particles
Post CMP cleaning
STI CMP

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Materials Science
Condensed Matter Physics

Access to Document

10.4028/www.scientific.net/SSP.103-104.283

Cite this

Tamilmani, S., Lowalekar, V., Raghavan, S., & Small, R. (2005). Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning. In P. Mertens, M. Meuris, & M. Heyns (Eds.), Ultra Clean Processing of Silicon Surfaces VII (pp. 283-286). (Solid State Phenomena; Vol. 103-104). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.103-104.283

Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning. / Tamilmani, S.; Lowalekar, V.; Raghavan, S. et al.
Ultra Clean Processing of Silicon Surfaces VII. ed. / Paul Mertens; Marc Meuris; Marc Heyns. Trans Tech Publications Ltd, 2005. p. 283-286 (Solid State Phenomena; Vol. 103-104).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tamilmani, S, Lowalekar, V, Raghavan, S & Small, R 2005, Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning. in P Mertens, M Meuris & M Heyns (eds), Ultra Clean Processing of Silicon Surfaces VII. Solid State Phenomena, vol. 103-104, Trans Tech Publications Ltd, pp. 283-286, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2004, Brussels, Belgium, 9/20/04. https://doi.org/10.4028/www.scientific.net/SSP.103-104.283

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title = "Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning",

keywords = "Ascorbic acid, Ceria particles, Post CMP cleaning, STI CMP",

author = "S. Tamilmani and V. Lowalekar and S. Raghavan and R. Small",

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Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning

Publication series

Other

Keywords

ASJC Scopus subject areas

Access to Document

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Cite this