Dislocations in III-nitride films grown on 4H-SiC mesas with and without surface steps

N. D. Bassim, M. E. Twigg, M. A. Mastro, C. R. Eddy, T. J. Zega, R. L. Henry, J. C. Culbertson, R. T. Holm, P. Neudeck, J. A. Powell, A. J. Trunek

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