Directed assembly of metal oxide nanobelts with microsystems into integrated nanosensors

Choongho Yu; Qing Hao; Li Shi; Dae Jin Kang; Xiangyang Kong; Z. L. Wang

doi:10.1115/IMECE2004-60931

Directed assembly of metal oxide nanobelts with microsystems into integrated nanosensors

Choongho Yu, Qing Hao, Li Shi, Dae Jin Kang, Xiangyang Kong, Z. L. Wang

Research output: Contribution to conference › Paper › peer-review

Abstract

Single-crystalline tin dioxide (SnO₂) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO₂), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

Original language	English (US)
Pages	543-547
Number of pages	5
DOIs	https://doi.org/10.1115/IMECE2004-60931
State	Published - 2004
Externally published	Yes
Event	2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004 - Anaheim, CA, United States Duration: Nov 13 2004 → Nov 19 2004

Other

Other	2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004
Country/Territory	United States
City	Anaheim, CA
Period	11/13/04 → 11/19/04

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1115/IMECE2004-60931

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title = "Directed assembly of metal oxide nanobelts with microsystems into integrated nanosensors",

abstract = "Single-crystalline tin dioxide (SnO2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.",

author = "Choongho Yu and Qing Hao and Li Shi and Kang, {Dae Jin} and Xiangyang Kong and Wang, {Z. L.}",

year = "2004",

doi = "10.1115/IMECE2004-60931",

language = "English (US)",

pages = "543--547",

note = "2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004 ; Conference date: 13-11-2004 Through 19-11-2004",

}

TY - CONF

T1 - Directed assembly of metal oxide nanobelts with microsystems into integrated nanosensors

AU - Yu, Choongho

AU - Hao, Qing

AU - Shi, Li

AU - Kang, Dae Jin

AU - Kong, Xiangyang

AU - Wang, Z. L.

PY - 2004

Y1 - 2004

N2 - Single-crystalline tin dioxide (SnO2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

AB - Single-crystalline tin dioxide (SnO2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

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DO - 10.1115/IMECE2004-60931

M3 - Paper

AN - SCOPUS:23244439564

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T2 - 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004

Y2 - 13 November 2004 through 19 November 2004

ER -

Directed assembly of metal oxide nanobelts with microsystems into integrated nanosensors

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