Diffraction of 0.5 keV electrons from free-standing transmission gratings

Ben McMorran; John D. Perreault; T. A. Savas; Alex Cronin

doi:10.1016/j.ultramic.2005.11.003

Diffraction of 0.5 keV electrons from free-standing transmission gratings

Ben McMorran
, John D. Perreault
, T. A. Savas
, Alex Cronin

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

A nanostructured grating was used to diffract a low-energy (500 eV) electron beam, and the current transmitted into the zeroth diffraction order was greater than 5% of the incident beam current. This diffraction efficiency indicates that the 55-nm-wide grating bars absorb electrons but the 45-nm-wide slots between bars transmit electron de Broglie waves coherently. The diffraction patterns can be asymmetric, and can be explained by a model that incorporates an electrostatic potential energy for electrons within 20 nm of the grating structure calculated by the method of images.

Original language	English (US)
Pages (from-to)	356-364
Number of pages	9
Journal	Ultramicroscopy
Volume	106
Issue number	4-5
DOIs	https://doi.org/10.1016/j.ultramic.2005.11.003
State	Published - Mar 2006
Externally published	Yes

Keywords

Electron holography
Electron interferometry
Image-charge
Inelastic scattering
Low voltage electron diffraction
Nanofabrication
Nanostructures

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/j.ultramic.2005.11.003

Cite this

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title = "Diffraction of 0.5 keV electrons from free-standing transmission gratings",

abstract = "A nanostructured grating was used to diffract a low-energy (500 eV) electron beam, and the current transmitted into the zeroth diffraction order was greater than 5\% of the incident beam current. This diffraction efficiency indicates that the 55-nm-wide grating bars absorb electrons but the 45-nm-wide slots between bars transmit electron de Broglie waves coherently. The diffraction patterns can be asymmetric, and can be explained by a model that incorporates an electrostatic potential energy for electrons within 20 nm of the grating structure calculated by the method of images.",

keywords = "Electron holography, Electron interferometry, Image-charge, Inelastic scattering, Low voltage electron diffraction, Nanofabrication, Nanostructures",

author = "Ben McMorran and Perreault, \{John D.\} and Savas, \{T. A.\} and Alex Cronin",

note = "Funding Information: We gratefully thank Gary Chandler for his support and instruction regarding our use of the SEM. This research was supported by an Award from Research Corporation, NSF Grant ECS-0404350, and NSF Grant PHY-0354947. ",

year = "2006",

month = mar,

doi = "10.1016/j.ultramic.2005.11.003",

language = "English (US)",

volume = "106",

pages = "356--364",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier B.V.",

number = "4-5",

}

TY - JOUR

T1 - Diffraction of 0.5 keV electrons from free-standing transmission gratings

AU - McMorran, Ben

AU - Perreault, John D.

AU - Savas, T. A.

AU - Cronin, Alex

N1 - Funding Information: We gratefully thank Gary Chandler for his support and instruction regarding our use of the SEM. This research was supported by an Award from Research Corporation, NSF Grant ECS-0404350, and NSF Grant PHY-0354947.

PY - 2006/3

Y1 - 2006/3

N2 - A nanostructured grating was used to diffract a low-energy (500 eV) electron beam, and the current transmitted into the zeroth diffraction order was greater than 5% of the incident beam current. This diffraction efficiency indicates that the 55-nm-wide grating bars absorb electrons but the 45-nm-wide slots between bars transmit electron de Broglie waves coherently. The diffraction patterns can be asymmetric, and can be explained by a model that incorporates an electrostatic potential energy for electrons within 20 nm of the grating structure calculated by the method of images.

AB - A nanostructured grating was used to diffract a low-energy (500 eV) electron beam, and the current transmitted into the zeroth diffraction order was greater than 5% of the incident beam current. This diffraction efficiency indicates that the 55-nm-wide grating bars absorb electrons but the 45-nm-wide slots between bars transmit electron de Broglie waves coherently. The diffraction patterns can be asymmetric, and can be explained by a model that incorporates an electrostatic potential energy for electrons within 20 nm of the grating structure calculated by the method of images.

KW - Electron holography

KW - Electron interferometry

KW - Image-charge

KW - Inelastic scattering

KW - Low voltage electron diffraction

KW - Nanofabrication

KW - Nanostructures

UR - https://www.scopus.com/pages/publications/33344457050

UR - https://www.scopus.com/pages/publications/33344457050#tab=citedBy

U2 - 10.1016/j.ultramic.2005.11.003

DO - 10.1016/j.ultramic.2005.11.003

M3 - Article

C2 - 16386372

AN - SCOPUS:33344457050

SN - 0304-3991

VL - 106

SP - 356

EP - 364

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 4-5

ER -

Diffraction of 0.5 keV electrons from free-standing transmission gratings

Abstract

Keywords

ASJC Scopus subject areas

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