Abstract
A nanostructured grating was used to diffract a low-energy (500 eV) electron beam, and the current transmitted into the zeroth diffraction order was greater than 5% of the incident beam current. This diffraction efficiency indicates that the 55-nm-wide grating bars absorb electrons but the 45-nm-wide slots between bars transmit electron de Broglie waves coherently. The diffraction patterns can be asymmetric, and can be explained by a model that incorporates an electrostatic potential energy for electrons within 20 nm of the grating structure calculated by the method of images.
Original language | English (US) |
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Pages (from-to) | 356-364 |
Number of pages | 9 |
Journal | Ultramicroscopy |
Volume | 106 |
Issue number | 4-5 |
DOIs | |
State | Published - Mar 2006 |
Externally published | Yes |
Keywords
- Electron holography
- Electron interferometry
- Image-charge
- Inelastic scattering
- Low voltage electron diffraction
- Nanofabrication
- Nanostructures
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Instrumentation