Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp

P. Äyräs, J. T. Rantala, S. Honkanen, S. B. Mendes, N. Peyghambarian

Research output: Contribution to journalArticlepeer-review

57 Scopus citations

Abstract

We report on the fabrication of diffraction gratings in photosensitive sol-gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosensitive sol-gel films by contact printing with an incoherent UV-light source. Gratings with 1-μm period were fabricated in sol-gel films. The diffraction efficiencies of each diffracted order were measured and compared to theoretical values. The demonstrated process of contact printing using a regular UV-light source in the optically compatible sol-gel material has potential for large-scale fabrication of submicrometer gratings at very low cost.

Original languageEnglish (US)
Pages (from-to)215-218
Number of pages4
JournalOptics Communications
Volume162
Issue number4
DOIs
StatePublished - Apr 15 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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