TY - JOUR
T1 - Diffraction efficiency characteristics for MEMS-based phase-only spatial light modulator with nonlinear phase distribution
AU - Ketchum, Remington S.
AU - Blanche, Pierre Alexandre
N1 - Funding Information:
Funding: This work is supported by Semiconductor Research Corporation Task No. 2810.052 through UT Dallas’ Texas Analog Center of Excellence (TxACE), with Texas Instruments as primary sponsor and industrial liaison.
Publisher Copyright:
© 2021 by the authors.
PY - 2021/3
Y1 - 2021/3
N2 - Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. This expands the practicality of PLMs to several applications, including communications, sensing, and high-speed displays. The complex structure and fabrication requirements for large, 2D MEMS arrays with vertical actuation have kept MEMS-based PLMs out of the market in favor of LCoS SLMs. Recently, Texas Instruments has adapted its existing DMD technology for fabricating MEMS-based PLMs. Here, we characterize the diffraction efficiency for one of these PLMs and examine the effect of a nonlinear distribution of addressable phase states across a range of wavelengths and illumination angles.
AB - Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. This expands the practicality of PLMs to several applications, including communications, sensing, and high-speed displays. The complex structure and fabrication requirements for large, 2D MEMS arrays with vertical actuation have kept MEMS-based PLMs out of the market in favor of LCoS SLMs. Recently, Texas Instruments has adapted its existing DMD technology for fabricating MEMS-based PLMs. Here, we characterize the diffraction efficiency for one of these PLMs and examine the effect of a nonlinear distribution of addressable phase states across a range of wavelengths and illumination angles.
KW - Diffraction
KW - Digital micromirror device
KW - Phase light modulation
KW - Spatial light modulation
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U2 - 10.3390/photonics8030062
DO - 10.3390/photonics8030062
M3 - Article
AN - SCOPUS:85102300051
SN - 2304-6732
VL - 8
SP - 1
EP - 9
JO - Photonics
JF - Photonics
IS - 3
M1 - 62
ER -