Abstract
There has not been much exploration of PLZT film properties as a function of composition reported in the literature. A survey of numerous PLZT films covering a wide spectrum of the PLZT phase diagram was undertaken to explore the dependence of film properties on composition. A series of sol-gel derived PLZT films were prepared on platinized Si wafers and fired to 700 C to obtain the perovskite phase. The film compositions include PLZT x/65/35, x/20/80, x/53/47 for x = 0, 2, 4, 6, 8, 10 and 12 and 7.5/x/y where x/y = 70/30, 53/47, 20/80 and 0/100. These films were characterized for their dielectric and ferroelectric properties. The films definitely showed a strong dependence of final film properties on composition, providing a valuable tool for the material engineering of ferroelectric film properties.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 433-438 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 361 |
| State | Published - 1995 |
| Externally published | Yes |
| Event | Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: Nov 28 1994 → Nov 30 1994 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering