Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO3 thin films

G. Teowee; K. C. McCarthy; E. K. Franke; J. M. Boulton; T. P. Alexander; T. J. Bukowski; D. R. Uhlmann

doi:10.1557/proc-433-431

Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO₃ thin films

G. Teowee, K. C. McCarthy, E. K. Franke, J. M. Boulton, T. P. Alexander, T. J. Bukowski, D. R. Uhlmann

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

A series of sol-gel derived CaTiO₃-PbTiO₃ thin films (i.e. Pb_1-xCa_xTiO₃ with x = 0-1) was prepared on platinized Si substrates and fired to temperatures ranging from 550 °C to 650 °C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400 °C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600 °C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

Original language	English (US)
Pages (from-to)	431-436
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	433
DOIs	https://doi.org/10.1557/proc-433-431
State	Published - 1996
Event	Proceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA Duration: Apr 8 1996 → Apr 12 1996

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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@article{dde36c78d9184aad864941fe6aa46384,

title = "Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO3 thin films",

abstract = "A series of sol-gel derived CaTiO3-PbTiO3 thin films (i.e. Pb1-xCaxTiO3 with x = 0-1) was prepared on platinized Si substrates and fired to temperatures ranging from 550 °C to 650 °C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400 °C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600 °C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.",

author = "G. Teowee and McCarthy, {K. C.} and Franke, {E. K.} and Boulton, {J. M.} and Alexander, {T. P.} and Bukowski, {T. J.} and Uhlmann, {D. R.}",

year = "1996",

doi = "10.1557/proc-433-431",

language = "English (US)",

volume = "433",

pages = "431--436",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1996 MRS Spring Symposium ; Conference date: 08-04-1996 Through 12-04-1996",

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TY - JOUR

T1 - Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO3 thin films

AU - Teowee, G.

AU - McCarthy, K. C.

AU - Franke, E. K.

AU - Boulton, J. M.

AU - Alexander, T. P.

AU - Bukowski, T. J.

AU - Uhlmann, D. R.

PY - 1996

Y1 - 1996

N2 - A series of sol-gel derived CaTiO3-PbTiO3 thin films (i.e. Pb1-xCaxTiO3 with x = 0-1) was prepared on platinized Si substrates and fired to temperatures ranging from 550 °C to 650 °C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400 °C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600 °C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

AB - A series of sol-gel derived CaTiO3-PbTiO3 thin films (i.e. Pb1-xCaxTiO3 with x = 0-1) was prepared on platinized Si substrates and fired to temperatures ranging from 550 °C to 650 °C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400 °C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600 °C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

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DO - 10.1557/proc-433-431

M3 - Conference article

AN - SCOPUS:0030387789

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VL - 433

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EP - 436

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Spring Symposium

Y2 - 8 April 1996 through 12 April 1996

ER -

Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO₃ thin films

Abstract

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