Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO3 thin films

G. Teowee, K. C. McCarthy, E. K. Franke, J. M. Boulton, T. P. Alexander, T. J. Bukowski, D. R. Uhlmann

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


A series of sol-gel derived CaTiO3-PbTiO3 thin films (i.e. Pb1-xCaxTiO3 with x = 0-1) was prepared on platinized Si substrates and fired to temperatures ranging from 550 °C to 650 °C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400 °C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600 °C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

Original languageEnglish (US)
Pages (from-to)431-436
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1996
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 8 1996Apr 12 1996

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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