Diamond disc diagnostic method based on "dry" coefficient of friction measurements

Anand Meled; Yasa Sampurno; Fransisca Sudargho; Yun Zhuang; Ara Philipossian

doi:10.1149/1.3494044

Diamond disc diagnostic method based on "dry" coefficient of friction measurements

Anand Meled, Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Ara Philipossian

Research output: Contribution to journal › Article › peer-review

Abstract

A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two "known good" (K1 and K2) and one "known bad" (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.

Original language	English (US)
Pages (from-to)	H457-H459
Journal	Electrochemical and Solid-State Letters
Volume	13
Issue number	12
DOIs	https://doi.org/10.1149/1.3494044
State	Published - 2010
Externally published	Yes

ASJC Scopus subject areas

General Chemical Engineering
General Materials Science
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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10.1149/1.3494044

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abstract = "A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two {"}known good{"} (K1 and K2) and one {"}known bad{"} (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.",

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T1 - Diamond disc diagnostic method based on "dry" coefficient of friction measurements

AU - Meled, Anand

AU - Sampurno, Yasa

AU - Sudargho, Fransisca

AU - Zhuang, Yun

AU - Philipossian, Ara

PY - 2010

Y1 - 2010

N2 - A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two "known good" (K1 and K2) and one "known bad" (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.

AB - A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two "known good" (K1 and K2) and one "known bad" (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.

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Diamond disc diagnostic method based on "dry" coefficient of friction measurements

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