Development and analysis of a high-pressure micro jet pad conditioning system for interlayer dielectric chemical mechanical planarization

Yoshiyuki Seike, Darren Denardis, Masano Sugiyama, Keiji Miyachi, Toshiro Doi, Ara Philipossian

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

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Engineering & Materials Science

Physics & Astronomy