Determining the Wafer Temperature in Atmospheric Thermal Silicon Oxidation Reactors

A. Philipossian, H. R. Soleimani

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Determining the Wafer Temperature in Atmospheric Thermal Silicon Oxidation Reactors'. Together they form a unique fingerprint.

Material Science

Keyphrases

Engineering