Fingerprint
Dive into the research topics of 'Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials
Davoud Zamani, Manish Keswani, Jun Yan, Srini Raghavan, Farhang Shadman
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Scopus
citations