@inbook{b54886652f7147718d2cd5597e787062,
title = "Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection",
abstract = "This chapter is devoted to the design of electro-thermal micro-actuators with capacitive position feedback. Analytical and finite element solutions of the electro-thermal and thermo-elastic problems are presented. A separate section is devoted to the challenging problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. These are illustrated with examples of electronic measurement circuits tested by the authors.",
keywords = "Charge Sensitive Amplifier, Operational Amplifier, Parasitic Capacitance, Peak Detector, Thermal Actuator",
author = "Lazarov, {Kalin V.} and Enikov, {Eniko T.}",
note = "Funding Information: This material is based upon the work supported in part by the National Science Foundation under Grant No. EEC-0407369. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Publisher Copyright: {\textcopyright} 2006, CISM, Udine.",
year = "2006",
doi = "10.1007/978-3-211-48549-1_5",
language = "English (US)",
series = "CISM International Centre for Mechanical Sciences, Courses and Lectures",
publisher = "Springer International Publishing",
pages = "101--118",
booktitle = "CISM International Centre for Mechanical Sciences, Courses and Lectures",
}