| Original language | English (US) |
|---|---|
| Pages | 409-421 |
| Number of pages | 13 |
| State | Published - 1983 |
ASJC Scopus subject areas
- General Engineering
DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY.
- M. Szilagyi
- , H. Paik
- , B. Siegel
Research output: Contribution to conference › Paper › peer-review