DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY.

M. Szilagyi, H. Paik, B. Siegel

Research output: Contribution to conference › Paper › peer-review

ASJC Scopus subject areas

TY - CONF

T1 - DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY.

AU - Szilagyi, M.

AU - Paik, H.

AU - Siegel, B.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0020504239&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020504239&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0020504239

SP - 409

EP - 421

ER -