Design of afocal components for optical metrology systems

R. Gappinger, G. A. Williby, J. E. Greivenkamp, J. M. Sasian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Optical metrology systems often use afocal telescopes to magnify or relay wavefronts. The optimization of afocal systems differs from standard lens design for imaging. The challenges include pupil definition, aberration evaluation, and merit function construction.

Original languageEnglish (US)
Title of host publicationOptical Fabrication and Testing, OFT 2000
PublisherOptica Publishing Group (formerly OSA)
Pages115-117
Number of pages3
ISBN (Electronic)1557526370
StatePublished - 2000
EventOptical Fabrication and Testing, OFT 2000 - Quebec City, Canada
Duration: Jun 8 2000 → …

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Fabrication and Testing, OFT 2000
Country/TerritoryCanada
CityQuebec City
Period6/8/00 → …

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Fingerprint

Dive into the research topics of 'Design of afocal components for optical metrology systems'. Together they form a unique fingerprint.

Cite this