@inproceedings{0fc1f23569e34d258e568733b4c86f88,
title = "Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer",
abstract = "Optomechanical design considerations are presented in the development of a fiber-delivered three degree-offreedom displacement measuring interferometer. The tool can be used to simultaneously calibrate the linear motion and rotational errors of a translating stage using a single measurement beam incident on a plane mirror target. This novel interferometer incorporates a quadrant photodiode to measure four spatially separated interference signals all within a single optical interference beam, otherwise known as differential wavefront sensing. In post processing, a weighted phase average is created over symmetrically adjacent pairings of detector elements to decouple and measure displacement and changes in pitch and yaw. Design considerations include a custom displacement interferometer architecture, mechanical analyses and qualification testing of a working prototype. This interferometer has the potential for providing multi-DOF calibrations for precision motion stages.",
keywords = "interferometry, optical metrology, optomechanical design, optomechanics",
author = "Gillmer, {Steven R.} and Ellis, {Jonathan D.}",
year = "2013",
doi = "10.1117/12.2023358",
language = "English (US)",
isbn = "9780819496867",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optomechanical Engineering 2013",
note = "Optomechanical Engineering 2013 ; Conference date: 26-08-2013 Through 29-08-2013",
}