Abstract
Emerging flat optical components based on single layers of metamaterials and metasurfaces have introduced a new approach to microlens arrays. These components hold promise for seamless integration with narrow-bandgap semiconductor-based infrared focal plane arrays, aiming to increase operating temperatures and improve imaging sensitivity. This study focuses on the design and rigorous coupled-wave analysis-based simulation of dielectric-transmissive metalens arrays, specifically tailored to optimize the performance of mid-wavelength infrared imaging arrays. Both Si and Ge metalenses are modeled and compared to spherical lenses, with Ge requiring a smaller aspect ratio than Si due to its higher refractive index, simplifying fabrication. Simulations demonstrate that pixel-registered flat metalenses achieve focusing efficiencies comparable to conventional spherical lenses by reducing the pillar pitch to 1 µm, improving phase profile accuracy and minimizing high-order diffraction losses. These findings highlight the potential of customized metalenses to advance infrared imaging technology and provide practical insights for optimizing imaging array performance through integration with microlens arrays.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 8304-8314 |
| Number of pages | 11 |
| Journal | Journal of Electronic Materials |
| Volume | 54 |
| Issue number | 10 |
| DOIs | |
| State | Published - Oct 2025 |
Keywords
- Microlens array
- focal plane arrays (FPAs)
- focusing efficiency
- infrared (IR)
- metalens
- rigorous coupled-wave analysis (RCWA)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
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