Design and fabrication of an integrated programmable floating-gate microphone

Tengge Ma; Tsz Yin Man; Yick Chuen Chan; Yitshak Zohar; Man Wong

Design and fabrication of an integrated programmable floating-gate microphone

Tengge Ma, Tsz Yin Man, Yick Chuen Chan, Yitshak Zohar, Man Wong

Research output: Contribution to conference › Paper › peer-review

Abstract

An integrated, programmable floating-gate capacitive microphone has been designed and fabricated. The conducting floating-gate is electrically insulated and is "programmed" by injecting electrons into it using Flower-Nordheim tunneling through a thin silicon dioxide film, thus capable of simulating an electret and generating a permanent electric field. A current-driving buffer based on metal-oxide-semiconductor field-effect transistors is integrated to reduce the capacitive loading of the microphone. The fabrication process is MOS compatible and promises the potential of integrating a variety of signal processing electronic circuits.

Original language	English (US)
Pages	288-291
Number of pages	4
State	Published - 2002
Externally published	Yes
Event	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: Jan 20 2002 → Jan 24 2002

Other

Other	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
Country/Territory	United States
City	Las Vegas, NV
Period	1/20/02 → 1/24/02

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

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title = "Design and fabrication of an integrated programmable floating-gate microphone",

abstract = "An integrated, programmable floating-gate capacitive microphone has been designed and fabricated. The conducting floating-gate is electrically insulated and is {"}programmed{"} by injecting electrons into it using Flower-Nordheim tunneling through a thin silicon dioxide film, thus capable of simulating an electret and generating a permanent electric field. A current-driving buffer based on metal-oxide-semiconductor field-effect transistors is integrated to reduce the capacitive loading of the microphone. The fabrication process is MOS compatible and promises the potential of integrating a variety of signal processing electronic circuits.",

author = "Tengge Ma and Man, {Tsz Yin} and Chan, {Yick Chuen} and Yitshak Zohar and Man Wong",

year = "2002",

language = "English (US)",

pages = "288--291",

note = "15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

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T1 - Design and fabrication of an integrated programmable floating-gate microphone

AU - Ma, Tengge

AU - Man, Tsz Yin

AU - Chan, Yick Chuen

AU - Zohar, Yitshak

AU - Wong, Man

PY - 2002

Y1 - 2002

N2 - An integrated, programmable floating-gate capacitive microphone has been designed and fabricated. The conducting floating-gate is electrically insulated and is "programmed" by injecting electrons into it using Flower-Nordheim tunneling through a thin silicon dioxide film, thus capable of simulating an electret and generating a permanent electric field. A current-driving buffer based on metal-oxide-semiconductor field-effect transistors is integrated to reduce the capacitive loading of the microphone. The fabrication process is MOS compatible and promises the potential of integrating a variety of signal processing electronic circuits.

AB - An integrated, programmable floating-gate capacitive microphone has been designed and fabricated. The conducting floating-gate is electrically insulated and is "programmed" by injecting electrons into it using Flower-Nordheim tunneling through a thin silicon dioxide film, thus capable of simulating an electret and generating a permanent electric field. A current-driving buffer based on metal-oxide-semiconductor field-effect transistors is integrated to reduce the capacitive loading of the microphone. The fabrication process is MOS compatible and promises the potential of integrating a variety of signal processing electronic circuits.

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M3 - Paper

AN - SCOPUS:0036122133

SP - 288

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T2 - 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002

Y2 - 20 January 2002 through 24 January 2002

ER -

Design and fabrication of an integrated programmable floating-gate microphone

Abstract

Other

ASJC Scopus subject areas

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