Abstract
Inertia micro-switches have been designed and realized using a low-temperature metal-electroplating technology compatible with processed substrates containing micro-electronic circuits. A simple but accurate lumped spring-mass model is developed based on analytical and numerical analyses. Predictions of the behavior of switches with different geometric designs have been verified using both drop hammer and shaker tests. With the application of an anti-stiction hydrophobic coating, improved storage time and un-encapsulated switches making over 50 million contacts have been demonstrated in room ambient.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 214-221 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4981 |
| DOIs | |
| State | Published - 2003 |
| Externally published | Yes |
| Event | MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - San Jose, CA, United States Duration: Jan 28 2003 → Jan 29 2003 |
Keywords
- Anti-stiction coating
- Electroplating
- Inertia micro-switch
- Threshold acceleration
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering