Design and calibration of large dynamic range optical metrology systems

John E. Greivenkamp

doi:10.1117/12.666804

Design and calibration of large dynamic range optical metrology systems

John E. Greivenkamp

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

Original language	English (US)
Article number	602403
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6024
DOIs	https://doi.org/10.1117/12.666804
State	Published - 2005
Event	ICO20: Optical Devices and Instruments - Changchun, China Duration: Aug 21 2005 → Aug 26 2005

Keywords

Aspheres
Interferometry
Optical Metrology
Optical Testing
Reverse Raytracing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.666804

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abstract = "Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.",

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AB - Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

KW - Aspheres

KW - Interferometry

KW - Optical Metrology

KW - Optical Testing

KW - Reverse Raytracing

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M3 - Conference article

AN - SCOPUS:33645001719

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VL - 6024

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 602403

T2 - ICO20: Optical Devices and Instruments

Y2 - 21 August 2005 through 26 August 2005

ER -

Design and calibration of large dynamic range optical metrology systems

Abstract

Keywords

ASJC Scopus subject areas

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