Data processing for point-based in situ metrology of freeform optical surface

Yu Zhang; Hsiang Nan Cheng; Rengmao Wu; Rongguang Liang

doi:10.1364/OE.25.013414

Data processing for point-based in situ metrology of freeform optical surface

Yu Zhang, Hsiang Nan Cheng, Rengmao Wu, Rongguang Liang

Optical Sciences

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

Freeform surfaces are widely used in advanced optical systems and the point-based metrology methods are often used for freeform surface measurement. In order to accurately process the measured data from point-based metrology system, the coordinate matching and surface fitting are essential. To ensure the matching efficiency and accuracy, we use a two-step coordinate matching method: pre-adjustment and accurate adjustment. We also develop an improved Newton iterative (INI) fitting algorithm to generate initial value and improve the fitting speed. The simulation and experiment verify the correctness and feasibility of the data processing.

Original language	English (US)
Pages (from-to)	13414-13424
Number of pages	11
Journal	Optics Express
Volume	25
Issue number	12
DOIs	https://doi.org/10.1364/OE.25.013414
State	Published - Jun 12 2017

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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abstract = "Freeform surfaces are widely used in advanced optical systems and the point-based metrology methods are often used for freeform surface measurement. In order to accurately process the measured data from point-based metrology system, the coordinate matching and surface fitting are essential. To ensure the matching efficiency and accuracy, we use a two-step coordinate matching method: pre-adjustment and accurate adjustment. We also develop an improved Newton iterative (INI) fitting algorithm to generate initial value and improve the fitting speed. The simulation and experiment verify the correctness and feasibility of the data processing.",

author = "Yu Zhang and Cheng, {Hsiang Nan} and Rengmao Wu and Rongguang Liang",

note = "Funding Information: National Natural Science Foundation of China (NSFC) (11304034); Program of China Scholarships Council (201508220104); Program of Jilin Provincial Educational Department (2015241); Doctoral Research Foundation of Northeast Electric Power University (BSJXM- 201218); Scientific Basic Research Foundation of Northeast Electric Power University. Publisher Copyright: {\textcopyright} 2017 Optical Society of America.",

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AU - Zhang, Yu

AU - Cheng, Hsiang Nan

AU - Wu, Rengmao

AU - Liang, Rongguang

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N2 - Freeform surfaces are widely used in advanced optical systems and the point-based metrology methods are often used for freeform surface measurement. In order to accurately process the measured data from point-based metrology system, the coordinate matching and surface fitting are essential. To ensure the matching efficiency and accuracy, we use a two-step coordinate matching method: pre-adjustment and accurate adjustment. We also develop an improved Newton iterative (INI) fitting algorithm to generate initial value and improve the fitting speed. The simulation and experiment verify the correctness and feasibility of the data processing.

AB - Freeform surfaces are widely used in advanced optical systems and the point-based metrology methods are often used for freeform surface measurement. In order to accurately process the measured data from point-based metrology system, the coordinate matching and surface fitting are essential. To ensure the matching efficiency and accuracy, we use a two-step coordinate matching method: pre-adjustment and accurate adjustment. We also develop an improved Newton iterative (INI) fitting algorithm to generate initial value and improve the fitting speed. The simulation and experiment verify the correctness and feasibility of the data processing.

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Data processing for point-based in situ metrology of freeform optical surface

Abstract

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