Data extraction from terahertz time domain spectroscopy measurements

Maik Scheller

Research output: Contribution to journalReview articlepeer-review

55 Scopus citations


The potential of terahertz (THz) time domain spectroscopy to simultaneously determine the complex dielectric parameters of materials and their geometrical thickness is of high interest for scientific spectroscopy and for general metrology. This paper provides an overview of the background of the data extraction from THz measurements and discusses the accuracy and ambiguity of this extraction process. It is shown that the signal to noise ratio of the measurement as well as the bandwidth of the accessible THz spectrum define the limitation of the achievable accuracy in the data extraction.

Original languageEnglish (US)
Pages (from-to)638-648
Number of pages11
JournalJournal of Infrared, Millimeter, and Terahertz Waves
Issue number8
StatePublished - Aug 2014


  • Data analysis
  • Fabry-Perót
  • Parameter extraction
  • Terahertz
  • Thickness determination

ASJC Scopus subject areas

  • Radiation
  • Instrumentation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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