Data Acquisition and Processing Modes for Quantitative Auger Electron Spectroscopy

Auger electron spectroscopy has been applied to the quantitative surface analysis of a series of metals (Ag, Cd, In, Sn), Indium-tin alloys, Indium and tin oxides, and Indlum-tln oxide (ITO) films. Spectra were obtained by two methods: (1)the conventional modulation technique, which results In the derivative spectrum, and (2) a direct current measurement, which gives an undifferentiated spectrum. For data collected In the latter mode, an Instrumental approach and secondary electron background correction are discussed. Quantitative results obtained by using this approach are shown to be more accurate than the traditional measurement method.