Data Acquisition and Processing Modes for Quantitative Auger Electron Spectroscopy

Michael C. Burrell, Roy S. Kaller, Neal R. Armstrong

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


Auger electron spectroscopy has been applied to the quantitative surface analysis of a series of metals (Ag, Cd, In, Sn), Indium-tin alloys, Indium and tin oxides, and Indlum-tln oxide (ITO) films. Spectra were obtained by two methods: (1)the conventional modulation technique, which results In the derivative spectrum, and (2) a direct current measurement, which gives an undifferentiated spectrum. For data collected In the latter mode, an Instrumental approach and secondary electron background correction are discussed. Quantitative results obtained by using this approach are shown to be more accurate than the traditional measurement method.

Original languageEnglish (US)
Pages (from-to)2511-2517
Number of pages7
JournalAnalytical Chemistry
Issue number14
StatePublished - Dec 1982

ASJC Scopus subject areas

  • Analytical Chemistry


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