TY - JOUR
T1 - Data Acquisition and Processing Modes for Quantitative Auger Electron Spectroscopy
AU - Burrell, Michael C.
AU - Kaller, Roy S.
AU - Armstrong, Neal R.
PY - 1982/12
Y1 - 1982/12
N2 - Auger electron spectroscopy has been applied to the quantitative surface analysis of a series of metals (Ag, Cd, In, Sn), Indium-tin alloys, Indium and tin oxides, and Indlum-tln oxide (ITO) films. Spectra were obtained by two methods: (1)the conventional modulation technique, which results In the derivative spectrum, and (2) a direct current measurement, which gives an undifferentiated spectrum. For data collected In the latter mode, an Instrumental approach and secondary electron background correction are discussed. Quantitative results obtained by using this approach are shown to be more accurate than the traditional measurement method.
AB - Auger electron spectroscopy has been applied to the quantitative surface analysis of a series of metals (Ag, Cd, In, Sn), Indium-tin alloys, Indium and tin oxides, and Indlum-tln oxide (ITO) films. Spectra were obtained by two methods: (1)the conventional modulation technique, which results In the derivative spectrum, and (2) a direct current measurement, which gives an undifferentiated spectrum. For data collected In the latter mode, an Instrumental approach and secondary electron background correction are discussed. Quantitative results obtained by using this approach are shown to be more accurate than the traditional measurement method.
UR - http://www.scopus.com/inward/record.url?scp=0020243584&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0020243584&partnerID=8YFLogxK
U2 - 10.1021/ac00251a024
DO - 10.1021/ac00251a024
M3 - Article
AN - SCOPUS:0020243584
VL - 54
SP - 2511
EP - 2517
JO - Analytical Chemistry
JF - Analytical Chemistry
SN - 0003-2700
IS - 14
ER -