Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

E. E. Harea; K. E. Aifantis; K. M. Pyrtsac; L. Ghimpu

doi:10.1007/978-94-017-9697-2_5

Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

E. E. Harea, K. E. Aifantis, K. M. Pyrtsac, L. Ghimpu

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to−3.7.

Original language	English (US)
Title of host publication	Nanoscience Advances in CBRN Agents Detection, Information and Energy Security
Publisher	Springer Netherlands
Pages	53-59
Number of pages	7
ISBN (Electronic)	9789401796972
ISBN (Print)	9789401796965
DOIs	https://doi.org/10.1007/978-94-017-9697-2_5
State	Published - Jan 1 2015
Externally published	Yes

Keywords

Cyclic nanoindentation
Strain sensor
Thin films

ASJC Scopus subject areas

General Biochemistry, Genetics and Molecular Biology
General Engineering
General Materials Science

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10.1007/978-94-017-9697-2_5

Cite this

Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films. / Harea, E. E.; Aifantis, K. E.; Pyrtsac, K. M. et al.
Nanoscience Advances in CBRN Agents Detection, Information and Energy Security. Springer Netherlands, 2015. p. 53-59.

Research output: Chapter in Book/Report/Conference proceeding › Chapter

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abstract = "The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to−3.7.",

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AU - Harea, E. E.

AU - Aifantis, K. E.

AU - Pyrtsac, K. M.

AU - Ghimpu, L.

N1 - Publisher Copyright: © Springer Science+Business Media Dordrecht 2015.

PY - 2015/1/1

Y1 - 2015/1/1

N2 - The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to−3.7.

AB - The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to−3.7.

KW - Cyclic nanoindentation

KW - Strain sensor

KW - Thin films

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ER -

Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

Abstract

Keywords

ASJC Scopus subject areas

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