Abstract
The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.
Original language | English (US) |
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Pages (from-to) | 53-59 |
Number of pages | 7 |
Journal | NATO Science for Peace and Security Series A: Chemistry and Biology |
Volume | 39 |
DOIs | |
State | Published - 2015 |
Keywords
- Cyclic nanoindentation
- Strain sensor
- Thin films
ASJC Scopus subject areas
- Chemistry(all)
- Biochemistry, Genetics and Molecular Biology (miscellaneous)
- Safety, Risk, Reliability and Quality