Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

E. E. Harea; K. E. Aifantis; K. M. Pyrtsac; L. Ghimpu

doi:10.1007/978-94-017-9697-2_5

Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

E. E. Harea, K. E. Aifantis, K. M. Pyrtsac, L. Ghimpu

Civil and Architectural Engineering and Mechanics

Research output: Contribution to journal › Article › peer-review

Abstract

The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

Original language	English (US)
Pages (from-to)	53-59
Number of pages	7
Journal	NATO Science for Peace and Security Series A: Chemistry and Biology
Volume	39
DOIs	https://doi.org/10.1007/978-94-017-9697-2_5
State	Published - 2015

Keywords

Cyclic nanoindentation
Strain sensor
Thin films

ASJC Scopus subject areas

Chemistry(all)
Biochemistry, Genetics and Molecular Biology (miscellaneous)
Safety, Risk, Reliability and Quality

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10.1007/978-94-017-9697-2_5

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abstract = "The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.",

keywords = "Cyclic nanoindentation, Strain sensor, Thin films",

author = "Harea, {E. E.} and Aifantis, {K. E.} and Pyrtsac, {K. M.} and L. Ghimpu",

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AU - Harea, E. E.

AU - Aifantis, K. E.

AU - Pyrtsac, K. M.

AU - Ghimpu, L.

N1 - Publisher Copyright: © Springer Science+Business Media Dordrecht 2015.

PY - 2015

Y1 - 2015

N2 - The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

AB - The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

KW - Cyclic nanoindentation

KW - Strain sensor

KW - Thin films

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JO - NATO Science for Peace and Security Series A: Chemistry and Biology

JF - NATO Science for Peace and Security Series A: Chemistry and Biology

ER -

Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

Abstract

Keywords

ASJC Scopus subject areas

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