Controlling transitional time of DMD mirror array by physical and electrical methods

Xianyue Deng; Yuzuru Takashima

doi:10.1117/12.2569569

Controlling transitional time of DMD mirror array by physical and electrical methods

Xianyue Deng, Yuzuru Takashima

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Digital Micromirror Device (DMD) is a commercial and mass-produced Micro Electromechanical System (MEMS) spatial light modulator (SLM) consisting of millions of mirrors that spatially modulate lights by switching it between on and off states. Between the on- and off-states, transitional states exist where micromirror changes tilt angle. We report a method to control the transitional time of the mirror array by controlling the pressure of the ambient air. The increased air pressure to 100 psi increases mirrors transitional time by 20%. We also address the possibility of controlling the transitional time electrically.

Original language	English (US)
Title of host publication	ODS 2020
Subtitle of host publication	Industrial Optical Devices and Systems
Editors	Ryuichi Katayama, Yuzuru Takashima
Publisher	SPIE
ISBN (Electronic)	9781510638068
DOIs	https://doi.org/10.1117/12.2569569
State	Published - 2020
Event	Industrial Optical Devices and Systems Conference 2020, ODS 2020 - Virtual, Online, United States Duration: Aug 24 2020 → Sep 4 2020

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11500
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Industrial Optical Devices and Systems Conference 2020, ODS 2020
Country/Territory	United States
City	Virtual, Online
Period	8/24/20 → 9/4/20

Keywords

DMD

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2569569

Cite this

Controlling transitional time of DMD mirror array by physical and electrical methods. / Deng, Xianyue; Takashima, Yuzuru.
ODS 2020: Industrial Optical Devices and Systems. ed. / Ryuichi Katayama; Yuzuru Takashima. SPIE, 2020. 115000D (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11500).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Deng, X & Takashima, Y 2020, Controlling transitional time of DMD mirror array by physical and electrical methods. in R Katayama & Y Takashima (eds), ODS 2020: Industrial Optical Devices and Systems., 115000D, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11500, SPIE, Industrial Optical Devices and Systems Conference 2020, ODS 2020, Virtual, Online, United States, 8/24/20. https://doi.org/10.1117/12.2569569

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abstract = "Digital Micromirror Device (DMD) is a commercial and mass-produced Micro Electromechanical System (MEMS) spatial light modulator (SLM) consisting of millions of mirrors that spatially modulate lights by switching it between on and off states. Between the on- and off-states, transitional states exist where micromirror changes tilt angle. We report a method to control the transitional time of the mirror array by controlling the pressure of the ambient air. The increased air pressure to 100 psi increases mirrors transitional time by 20%. We also address the possibility of controlling the transitional time electrically.",

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AB - Digital Micromirror Device (DMD) is a commercial and mass-produced Micro Electromechanical System (MEMS) spatial light modulator (SLM) consisting of millions of mirrors that spatially modulate lights by switching it between on and off states. Between the on- and off-states, transitional states exist where micromirror changes tilt angle. We report a method to control the transitional time of the mirror array by controlling the pressure of the ambient air. The increased air pressure to 100 psi increases mirrors transitional time by 20%. We also address the possibility of controlling the transitional time electrically.

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Controlling transitional time of DMD mirror array by physical and electrical methods

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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