Continuous-wave 193.4 nm laser with 120 mW output power

Jun Sakuma, Yushi Kaneda, Naoya Oka, Takayuki Ishida, Koichi Moriizumi, Haruhiko Kusunose, Yasunori Furukawa

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


This Letter describes an all-solid-state continuous-wave, deep-ultraviolet coherent source that generates more than 100 mW of output power at 193.4 nm. The source is based on nonlinear frequency conversion of three single-frequency infrared fiber laser master-oscillator power-amplifier (MOPA) light sources.

Original languageEnglish (US)
Pages (from-to)5590-5593
Number of pages4
JournalOptics letters
Issue number23
StatePublished - Dec 1 2015

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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