Computer modeling of surface interactions and contaminant transport in microstructures during the rinsing of patterned semiconductor wafers

M. R. Dodge, F. Shadman

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Computer modeling of surface interactions and contaminant transport in microstructures during the rinsing of patterned semiconductor wafers'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds