Abstract
a-Si layers could serve as a low-cost precursor for fabricating a poly-Si absorber for photovoltaic cells. We prepared a-Si films onto glass substrates by RF-magnetron sputtering. The Ar-gas pressure was adjusted from 0.7 to 4.5 Pa to reach average rates (≳1.0nm/s), and increase manufacturing efficiency. We analyzed the structural and optical properties of the a-Si films using Raman and optical transmission spectroscopies. The Cody-Lorentz model was adopted to calculate their complex refractive index.
| Original language | English (US) |
|---|---|
| Article number | 134485 |
| Journal | Materials Letters |
| Volume | 345 |
| DOIs | |
| State | Published - Aug 15 2023 |
Keywords
- Amorphous materials
- Optical materials and properties
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
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