@inproceedings{2f30ee0b75fb4aeb8410b3b8d7792488,
title = "Compensating film stress in thin mirrors using ion implantation",
author = "Chalifoux, {Brandon D.} and Youwei Yao and Woller, {Kevin B.} and Heilmann, {Ralf K.} and Schattenburg, {Mark L.}",
note = "Funding Information: This work was funded by NASA APRA grants NNX14AE76G and NNX17AE47G.; 33rd Annual Meeting of the American Society for Precision Engineering, ASPE 2018 ; Conference date: 04-11-2018 Through 09-11-2018",
year = "2018",
language = "English (US)",
series = "Proceedings - 33rd ASPE Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "253--258",
booktitle = "Proceedings - 33rd ASPE Annual Meeting",
}