Compensating film stress in silicon substrates for the Lynx X-ray telescope mission concept using ion implantation

Brandon Chalifoux, Youwei Yao, Heng E. Zuo, Ralf K. Heilmann, Mark L. Schattenburg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

Ion implantation is used to correct figure errors resulting from film stress in thin silicon mirror substrates. The Lynx mission concept requires mirrors with extremely small figure errors and excellent X-ray reflectivity, and only a small portion of the mirror error budget may be allocated to distortion from film stress. While reducing film stress in itself is ideal, compensation of film stress may be required. In addition, compensation, in combination with other film stress reduction techniques, may allow freedom in making coatings with optimal x-ray performance while minimizing distortion. Ion implantation offers a rapid method of applying a precise stress distribution to the backside of a mirror, which may be used to compensate for a uniform or non-uniform film stress. In this paper, we demonstrate the use of ion implantation to achieve a roughly 10x reduction in deformation from film stress, and that the stress from ion implantation is stable over at least five months.

Original languageEnglish (US)
Title of host publicationSpace Telescopes and Instrumentation 2018
Subtitle of host publicationUltraviolet to Gamma Ray
EditorsShouleh Nikzad, Jan-Willem A. Den Herder, Kazuhiro Nakazawa
PublisherSPIE
ISBN (Print)9781510619517
DOIs
StatePublished - 2018
Externally publishedYes
EventSpace Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray - Austin, United States
Duration: Jun 10 2018Jun 15 2018

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10699
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherSpace Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
Country/TerritoryUnited States
CityAustin
Period6/10/186/15/18

Keywords

  • Lynx
  • X-ray
  • figure correction
  • film stress
  • ion implantation
  • optics
  • stability
  • telescope

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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