Fingerprint
Dive into the research topics of 'Comparison of copper disc and copper wafer polishing processes in terms of their kinetic, tribological and thermal characteristics'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Z. Li, S. Rader, P. Lefevre, K. Ina, D. Boning, A. Philipossian
Research output: Contribution to conference › Paper › peer-review