Compact snapshot dual-mode interferometric system for on-machine measurement

Engineering

• Shape Surface 100%
• Simplifies 50%
• Subaperture 50%
• Spatial Frequency 50%
• Numerical Experiment 50%
• Interferogram 50%
• Optical Element 50%
• Aperture Size 50%
• Measurement Process 50%
• Environmental Disturbance 50%
• Optical Filter 50%
• Reference Arm 50%
• Machine Metrology 50%

Keyphrases

• On-machine Measurement 100%
• Portable Tool 50%
• Dual-mode Interferometer 50%
• Surface Shape Measurement 50%
• On-machine 50%
• Pi-2 50%