@inproceedings{6c8a36e67d994bd990b2a2a54bb18303,
title = "Compact six degree-of-freedom interferometer for precision linear stage metrology",
author = "Xiangzhi Yu and Gillmer, \{Steven R.\} and Howard, \{Stephen C.\} and Woody, \{Shane C.\} and Ellis, \{Jonathan D.\}",
year = "2015",
language = "English (US)",
series = "Proceedings - ASPE 2015 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "415--418",
booktitle = "Proceedings - ASPE 2015 Annual Meeting",
note = "30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 ; Conference date: 01-11-2015 Through 06-11-2015",
}