Communication - An Analysis of Shear Forces in Post-CMP PVA Brush Scrubbing for Stationary and Rotating Wafers
- Y. Sampurno
- , A. N. Linhart
- , K. M. Wortman-Otto
- , A. Philipossian
- , J. J. Keleher
Research output: Contribution to journal › Article › peer-review
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