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Communication - An Analysis of Shear Forces in Post-CMP PVA Brush Scrubbing for Stationary and Rotating Wafers
Y. Sampurno, A. N. Linhart, K. M. Wortman-Otto, A. Philipossian, J. J. Keleher
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations