Combined photonics and MEMs function demonstration

O. Blum; M. E. Warren; H. Q. Hou; R. F. Carson; K. D. Choquette; M. S. Rodgers; J. J. Sniegowski

doi:10.1117/12.305469

Combined photonics and MEMs function demonstration

O. Blum
, M. E. Warren
, H. Q. Hou
, R. F. Carson
, K. D. Choquette
, M. S. Rodgers
, J. J. Sniegowski

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

We discuss two examples of integration of micro-electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 μm is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

Original language	English (US)
Pages (from-to)	57-61
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3286
DOIs	https://doi.org/10.1117/12.305469
State	Published - 1998
Externally published	Yes
Event	Vertical-Cavity Surface-Emitting Lasers II - San Jose, CA, United States Duration: Jan 28 1998 → Jan 29 1998

Keywords

Integration
MEMs
Microsystem
Photonic
Shutter
VCSEL

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.305469

Cite this

@article{5ad0d1d99b4943178afe3dba0a1f1472,

title = "Combined photonics and MEMs function demonstration",

abstract = "We discuss two examples of integration of micro-electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 μm is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.",

keywords = "Integration, MEMs, Microsystem, Photonic, Shutter, VCSEL",

author = "O. Blum and Warren, \{M. E.\} and Hou, \{H. Q.\} and Carson, \{R. F.\} and Choquette, \{K. D.\} and Rodgers, \{M. S.\} and Sniegowski, \{J. J.\}",

year = "1998",

doi = "10.1117/12.305469",

language = "English (US)",

volume = "3286",

pages = "57--61",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Vertical-Cavity Surface-Emitting Lasers II ; Conference date: 28-01-1998 Through 29-01-1998",

}

TY - JOUR

T1 - Combined photonics and MEMs function demonstration

AU - Blum, O.

AU - Warren, M. E.

AU - Hou, H. Q.

AU - Carson, R. F.

AU - Choquette, K. D.

AU - Rodgers, M. S.

AU - Sniegowski, J. J.

PY - 1998

Y1 - 1998

N2 - We discuss two examples of integration of micro-electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 μm is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

AB - We discuss two examples of integration of micro-electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 μm is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

KW - Integration

KW - MEMs

KW - Microsystem

KW - Photonic

KW - Shutter

KW - VCSEL

UR - https://www.scopus.com/pages/publications/0032225039

UR - https://www.scopus.com/pages/publications/0032225039#tab=citedBy

U2 - 10.1117/12.305469

DO - 10.1117/12.305469

M3 - Conference article

AN - SCOPUS:0032225039

SN - 0277-786X

VL - 3286

SP - 57

EP - 61

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Vertical-Cavity Surface-Emitting Lasers II

Y2 - 28 January 1998 through 29 January 1998

ER -

Combined photonics and MEMs function demonstration

Abstract

Keywords

ASJC Scopus subject areas

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